@article{ETD, school = {Ph.D.}, author = {Deng, Chaodan and }, url = {http://digitalcollections.ohsu.edu/record/101}, title = {Process development for si-based nanostructures using pulsed UV laser induced epitaxy}, publisher = {Oregon Graduate Institute of Science and Technology}, number = {ETD}, doi = {https://doi.org/10.6083/M4XS5S9K}, recid = {101}, address = {1995}, }