@article{ETD,
      school = {Ph.D.},
      author = {McCarthy, John M. and },
      url = {http://digitalcollections.ohsu.edu/record/12},
      title = {The microstructural effects of metallization and heat  treatment on thin gate oxide for use in sub-micron MOSFETs},
      publisher = {Oregon Graduate Institute of Science and Technology},
      number = {ETD},
      doi = {https://doi.org/10.6083/M4F769GJ},
      recid = {12},
      address = {1996},
}