000000012 001__ 12
000000012 005__ 20231130114531.0
000000012 0247_ $$2DOI$$a10.6083/M4F769GJ
000000012 037__ $$aETD
000000012 245__ $$aThe microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs
000000012 260__ $$bOregon Graduate Institute of Science and Technology
000000012 269__ $$a1996
000000012 336__ $$aThesis
000000012 502__ $$bPh.D.
000000012 540__ $$fCC BY
000000012 542__ $$fIn copyright - single owner
000000012 6531_ $$ametallic films
000000012 6531_ $$ametal oxide semiconductor field-effect transistors
000000012 6531_ $$asputtering (physics)
000000012 692__ $$aDepartment of Materials Science and Engineering$$041420
000000012 7001_ $$aMcCarthy, John M.
000000012 7001_ $$uOregon Graduate Institute of Science and Technology$$041352
000000012 8564_ $$93fdd81df-eceb-4028-bc4a-1465efdbe2cb$$s51249053$$uhttps://digitalcollections.ohsu.edu/record/12/files/12_etd.pdf
000000012 905__ $$a/rest/prod/h1/28/nd/68/h128nd689
000000012 909CO $$ooai:digitalcollections.ohsu.edu:12$$pstudent-work
000000012 980__ $$aTheses and Dissertations