@article{ETD,
      school = {M.S.},
      author = {Dianatkhah, Kambiz and },
      url = {http://digitalcollections.ohsu.edu/record/1838},
      title = {Passivation behavior of copper thin films for  electrochemical planarization application},
      publisher = {Oregon Graduate Institute of Science and Technology},
      number = {ETD},
      doi = {https://doi.org/10.6083/M4PN93VF},
      recid = {1838},
      address = {1999},
}