@article{ETD,
      recid = {2053},
      author = {Lantz, Scott L. and },
      title = {Influence of surface preparation on the chemical vapor  deposition of W on Si(100) and polycrystalline TiN  surfaces},
      publisher = {Oregon Health and Sciences University},
      school = {Ph.D.},
      address = {1995-01-01},
      number = {ETD},
      url = {http://digitalcollections.ohsu.edu/record/2053},
      doi = {https://doi.org/10.6083/M43R0R47},
}