000002053 001__ 2053
000002053 005__ 20231130114554.0
000002053 0247_ $$2DOI$$a10.6083/M43R0R47
000002053 037__ $$aETD
000002053 245__ $$aInfluence of surface preparation on the chemical vapor deposition of W on Si(100) and polycrystalline TiN surfaces
000002053 260__ $$bOregon Health and Sciences University
000002053 260__ $$bOregon Graduate Institute of Science and Technology
000002053 269__ $$a1995-01-01
000002053 336__ $$aDissertation
000002053 502__ $$bPh.D.
000002053 542__ $$fIn copyright - single owner
000002053 7001_ $$aLantz, Scott L.
000002053 7001_ $$uOregon Graduate Institute of Science and Technology$$041352
000002053 8564_ $$986760339-810a-4d66-bc9a-bc783fe8d9d9$$s37469619$$uhttps://digitalcollections.ohsu.edu/record/2053/files/2770_etd.pdf
000002053 905__ $$a/rest/prod/6m/31/1p/52/6m311p52z
000002053 909CO $$ooai:digitalcollections.ohsu.edu:2053$$pstudent-work
000002053 980__ $$aTheses and Dissertations