@article{ETD,
      school = {Ph.D.},
      author = {Huo, Jinshan and },
      url = {http://digitalcollections.ohsu.edu/record/209},
      title = {Electrochemical planarization of copper for  microelectronic applications},
      publisher = {Oregon Health and Science University},
      number = {ETD},
      doi = {https://doi.org/10.6083/M4028PFN},
      recid = {209},
      address = {2004},
}