000002474 001__ 2474
000002474 005__ 20231130114556.0
000002474 0247_ $$2DOI$$a10.6083/M40P0XBC
000002474 037__ $$aETD
000002474 245__ $$aEffect of thiols and their aging on Cu electrodeposition for ULSI interconnects
000002474 260__ $$bOregon Health and Sciences University
000002474 260__ $$bOregon Health and Science University
000002474 269__ $$a2002-02-01
000002474 336__ $$aDissertation
000002474 502__ $$bPh.D.
000002474 542__ $$fIn copyright - single owner
000002474 691__ $$aOGI School of Science and Engineering$$041365
000002474 7001_ $$aZhi, Charlie C.
000002474 7001_ $$uOregon Health and Science University$$041354
000002474 8564_ $$9e7a653d2-929a-4e24-8b9d-e65420b373ed$$s17083621$$uhttps://digitalcollections.ohsu.edu/record/2474/files/3213_etd.pdf
000002474 905__ $$a/rest/prod/dr/26/xx/54/dr26xx54h
000002474 909CO $$ooai:digitalcollections.ohsu.edu:2474$$pstudent-work
000002474 980__ $$aTheses and Dissertations