000002474 001__ 2474
000002474 005__ 20250501112454.0
000002474 0247_ $$2DOI$$a10.6083/M40P0XBC
000002474 037__ $$aETD
000002474 245__ $$aEffect of thiols and their aging on Cu electrodeposition for ULSI interconnects
000002474 260__ $$bOregon Health and Sciences University
000002474 269__ $$a2002-02-01
000002474 336__ $$aDissertation
000002474 502__ $$bPh.D.
000002474 520__ $$aSix model thiols, Bis-(3-Sulfopropy1)-disulfide sodium salt (SPS), 3-Mercapto-l- propanesulfonic sodium salt (MPS), (O-Ethyldithiocarbonato)-s-(3-sulfoproplyl)-ester potassium salt(OPX),  3-S-Isothiuronium  Propyl Sulfonate(UPS), N, N-Dimethyl- dithiocarbarnylpropyl sulfonic sodium salt  (DPS),  and  3 (Benzothiazolyl-2-mercapto)-propyl-sulfonic sodium salt  (ZPS) in an acid-copper plating bath containing chloride ions and polyethylene glycol (PEG) have been systematically evaluated and characterized by electrochemical method and by fill study.
000002474 542__ $$fIn copyright - single owner
000002474 650__ $$aPotassium$$024467
000002474 650__ $$aSodium
000002474 650__ $$aSulfhydryl Compounds$$026588
000002474 691__ $$aOGI School of Science and Engineering$$041365
000002474 692__ $$aOGI Department of Electrical and Computer Engineering$$041409
000002474 7001_ $$aZhi, Charlie$$uOregon Health and Science University$$041354
000002474 7201_ $$aSolanki, Rajendra$$uOregon Graduate Institute of Science and Technology$$041352$$7Personal$$eAdvisor
000002474 8564_ $$9e7a653d2-929a-4e24-8b9d-e65420b373ed$$s17083621$$uhttps://digitalcollections.ohsu.edu/record/2474/files/3213_etd.pdf$$ePublic$$2112dcfd8454fb21a3690c395895c61dc$$31
000002474 905__ $$a/rest/prod/dr/26/xx/54/dr26xx54h
000002474 909CO $$ooai:digitalcollections.ohsu.edu:2474$$pstudent-work
000002474 980__ $$aTheses and Dissertations