000000279 001__ 279
000000279 005__ 20231130114545.0
000000279 0247_ $$2DOI$$a10.6083/M4XS5SB1
000000279 037__ $$aETD
000000279 245__ $$aA theoretical and experimental study of liquid metal ion sources and their application to focused ion beam technology
000000279 260__ $$bOregon Graduate Center
000000279 269__ $$a1988
000000279 336__ $$aDissertation
000000279 502__ $$bPh.D.
000000279 540__ $$fCC BY
000000279 542__ $$fIn copyright - single owner
000000279 650__ $$aGallium$$019363
000000279 6531_ $$aion beam lithography
000000279 692__ $$aDepartment of Electrical Engineering and Applied Physics$$041410
000000279 7001_ $$aPuretz, Joseph
000000279 7001_ $$uOregon Graduate Center$$041351
000000279 8564_ $$993badd40-7791-4b19-a915-8e53132b42d7$$s13938943$$uhttps://digitalcollections.ohsu.edu/record/279/files/279_etd.pdf
000000279 905__ $$a/rest/prod/mg/74/qm/09/mg74qm09p
000000279 909CO $$ooai:digitalcollections.ohsu.edu:279$$pstudent-work
000000279 980__ $$aTheses and Dissertations