TY  - GEN
DO  - 10.6083/M4T151M0
DO  - DOI
AD  - Oregon Graduate Center
T1  - Nanoscale microfabrication prospects using proximity focused liquid metal ion sources
DA  - 1988
AU  - Rao, Radhakrishna A.
L1  - https://digitalcollections.ohsu.edu/record/280/files/280_etd.pdf
PB  - Oregon Graduate Center
PY  - 1988
ID  - 280
L4  - https://digitalcollections.ohsu.edu/record/280/files/280_etd.pdf
KW  - microlithography
KW  - field emission
TI  - Nanoscale microfabrication prospects using proximity focused liquid metal ion sources
Y1  - 1988
L2  - https://digitalcollections.ohsu.edu/record/280/files/280_etd.pdf
LK  - https://digitalcollections.ohsu.edu/record/280/files/280_etd.pdf
UR  - https://digitalcollections.ohsu.edu/record/280/files/280_etd.pdf
ER  -