@article{ETD,
      school = {M.S.},
      author = {Brainerd, Steve and },
      url = {http://digitalcollections.ohsu.edu/record/282},
      title = {Off-axis illumination for extending optical  microlithographic system performance},
      publisher = {Oregon Graduate Institute of Science and Technology},
      number = {ETD},
      doi = {https://doi.org/10.6083/M4JM27K8},
      recid = {282},
      address = {1993},
}