TY  - THES
DO  - 10.6083/M4JM27K8
DO  - DOI
AD  - Oregon Graduate Institute of Science and Technology
T1  - Off-axis illumination for extending optical microlithographic system performance
DA  - 1993
AU  - Brainerd, Steve
L1  - https://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
PB  - Oregon Graduate Institute of Science and Technology
PY  - 1993
ID  - 282
L4  - https://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
KW  - semiconductor wafers
KW  - microlithography
TI  - Off-axis illumination for extending optical microlithographic system performance
Y1  - 1993
L2  - https://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
LK  - https://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
UR  - https://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
ER  -