000000282 001__ 282
000000282 005__ 20231130114546.0
000000282 0247_ $$2DOI$$a10.6083/M4JM27K8
000000282 037__ $$aETD
000000282 245__ $$aOff-axis illumination for extending optical microlithographic system performance
000000282 260__ $$bOregon Graduate Institute of Science and Technology
000000282 269__ $$a1993
000000282 336__ $$aThesis
000000282 502__ $$bM.S.
000000282 540__ $$fCC BY
000000282 542__ $$fIn copyright - single owner
000000282 6531_ $$asemiconductor wafers
000000282 6531_ $$amicrolithography
000000282 692__ $$aDepartment of Electrical and Computer Engineering$$041409
000000282 7001_ $$aBrainerd, Steve
000000282 7001_ $$uOregon Graduate Institute of Science and Technology$$041352
000000282 8564_ $$9c9f994f0-3788-46ca-8eeb-e26b28089887$$s3750150$$uhttps://digitalcollections.ohsu.edu/record/282/files/282_etd.pdf
000000282 905__ $$a/rest/prod/dj/52/w4/68/dj52w4688
000000282 909CO $$ooai:digitalcollections.ohsu.edu:282$$pstudent-work
000000282 980__ $$aTheses and Dissertations