TY  - THES
AB  - New MOS (metal-oxide-semiconductor) field-effect gas sensors capable of detecting carbon monoxide at low concentrations and operating temperatures are fabricated and tested. Acatalytic multi-layer gate system is presented composed of a 60 nm iron oxide nanoparticle film deposited by thermal evaporation and an additional 60 nm platinum surface layer gate electrode film deposited using direct pattern focused ion beam (FIB) deposition. The sensor integrates the catalytic properties of a highly diffusive platinum thin film and the gas absorptive properties of iron oxide, both mechanisms previously shown to independently produce work function changes in an MOS capacitor in the presence of carbon monoxide.
AD  - Oregon Health and Science University
AU  - Hunter, Jeffrey
DA  - 2003-10-01
DO  - 10.6083/M47H1GW0
DO  - DOI
ED  - McCarthy, Jack
ED  - Advisor
ID  - 7919
KW  - Carbon Monoxide
KW  - Semiconductors
KW  - Oxides
L1  - https://digitalcollections.ohsu.edu/record/7919/files/200310.hunter.jeffrey.pdf
L2  - https://digitalcollections.ohsu.edu/record/7919/files/200310.hunter.jeffrey.pdf
L4  - https://digitalcollections.ohsu.edu/record/7919/files/200310.hunter.jeffrey.pdf
LK  - https://digitalcollections.ohsu.edu/record/7919/files/200310.hunter.jeffrey.pdf
N2  - New MOS (metal-oxide-semiconductor) field-effect gas sensors capable of detecting carbon monoxide at low concentrations and operating temperatures are fabricated and tested. Acatalytic multi-layer gate system is presented composed of a 60 nm iron oxide nanoparticle film deposited by thermal evaporation and an additional 60 nm platinum surface layer gate electrode film deposited using direct pattern focused ion beam (FIB) deposition. The sensor integrates the catalytic properties of a highly diffusive platinum thin film and the gas absorptive properties of iron oxide, both mechanisms previously shown to independently produce work function changes in an MOS capacitor in the presence of carbon monoxide.
PB  - Oregon Health and Science University
PY  - 2003-10-01
T1  - Carbon monoxide gas sensing properties of metal-oxide-semiconductor capacitor sensor
TI  - Carbon monoxide gas sensing properties of metal-oxide-semiconductor capacitor sensor
UR  - https://digitalcollections.ohsu.edu/record/7919/files/200310.hunter.jeffrey.pdf
Y1  - 2003-10-01
ER  -