TY  - THES
AB  - Recent advances in Micro Electro Mechanical Systems (MEMS), semiconductor sensors, and actuator chip-based technology, have incorporated many non-standard silicon processing materials in their design. The use of materials such as  polymers in  conjunction  with  standard  CMOS  processing and  materials  has  enabled  many  new MEMS sensors and actuators to be created.  Even though the design enabling flexibility of polymers maybe very high, the processing and implementation of polymers for a given application is  often more  complex than what  is  encountered with  standard engineering materials due to their ubiquitous qualities.  The main focus of this thesis is to investigate both  the  tensile mechanical  properties  of  Polydimethylsiloxane  (PDMS),  a  material increasingly used in MEMS, and large deflection membrane theory to provide more accurate tensile mechanical material properties and analytical membrane models for MEMS  application design with  PDMS.
AD  - Oregon Health and Science University
AU  - Roman, Patrick
DA  - 2004-02-01
DO  - 10.6083/M41834S0
DO  - DOI
ED  - Kirkpatrick, Sean
ED  - Advisor
ID  - 7926
KW  - Micro-Electrical-Mechanical Systems
KW  - Semiconductors
KW  - Dimethylpolysiloxanes
KW  - polydimethylsiloxane
L1  - https://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf
L2  - https://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf
L4  - https://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf
LK  - https://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf
N2  - Recent advances in Micro Electro Mechanical Systems (MEMS), semiconductor sensors, and actuator chip-based technology, have incorporated many non-standard silicon processing materials in their design. The use of materials such as  polymers in  conjunction  with  standard  CMOS  processing and  materials  has  enabled  many  new MEMS sensors and actuators to be created.  Even though the design enabling flexibility of polymers maybe very high, the processing and implementation of polymers for a given application is  often more  complex than what  is  encountered with  standard engineering materials due to their ubiquitous qualities.  The main focus of this thesis is to investigate both  the  tensile mechanical  properties  of  Polydimethylsiloxane  (PDMS),  a  material increasingly used in MEMS, and large deflection membrane theory to provide more accurate tensile mechanical material properties and analytical membrane models for MEMS  application design with  PDMS.
PB  - Oregon Health and Science University
PY  - 2004-02-01
T1  - Polydimethylsiloxane tensile mechanical properties and membrane deflection theory
TI  - Polydimethylsiloxane tensile mechanical properties and membrane deflection theory
UR  - https://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf
Y1  - 2004-02-01
ER  -