000007926 001__ 7926 000007926 005__ 20250424233305.0 000007926 0247_ $$2DOI$$a10.6083/M41834S0 000007926 037__ $$aETD 000007926 245__ $$aPolydimethylsiloxane tensile mechanical properties and membrane deflection theory 000007926 260__ $$bOregon Health and Science University 000007926 269__ $$a2004-02-01 000007926 336__ $$aThesis 000007926 502__ $$bM.S. 000007926 520__ $$aRecent advances in Micro Electro Mechanical Systems (MEMS), semiconductor sensors, and actuator chip-based technology, have incorporated many non-standard silicon processing materials in their design. The use of materials such as polymers in conjunction with standard CMOS processing and materials has enabled many new MEMS sensors and actuators to be created. Even though the design enabling flexibility of polymers maybe very high, the processing and implementation of polymers for a given application is often more complex than what is encountered with standard engineering materials due to their ubiquitous qualities. The main focus of this thesis is to investigate both the tensile mechanical properties of Polydimethylsiloxane (PDMS), a material increasingly used in MEMS, and large deflection membrane theory to provide more accurate tensile mechanical material properties and analytical membrane models for MEMS application design with PDMS. 000007926 542__ $$fIn copyright - single owner 000007926 650__ $$aMicro-Electrical-Mechanical Systems$$038395 000007926 650__ $$aSemiconductors$$025858 000007926 650__ $$aDimethylpolysiloxanes$$017868 000007926 6531_ $$apolydimethylsiloxane 000007926 691__ $$aOGI School of Science and Engineering$$041365 000007926 692__ $$aOGI Department of Electrical and Computer Engineering$$041409 000007926 7001_ $$aRoman, Patrick$$uOregon Health and Science University$$041354 000007926 7201_ $$aKirkpatrick, Sean$$uOregon Health and Science University$$041354$$7Personal$$eAdvisor 000007926 8564_ $$963190e7d-e2fd-4623-8bb1-f8e5e5f3716a$$s19166743$$uhttps://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf$$ePublic$$223fcc2b4e6259f30a7d3eb55b6545a0b$$31 000007926 905__ $$a/rest/prod/vt/15/0k/01/vt150k013 000007926 909CO $$ooai:digitalcollections.ohsu.edu:7926$$pstudent-work 000007926 980__ $$aTheses and Dissertations