000007926 001__ 7926 000007926 005__ 20240124114254.0 000007926 0247_ $$2DOI$$a10.6083/M41834S0 000007926 037__ $$aETD 000007926 245__ $$aPolydimethylsiloxane tensile mechanical properties and membrane deflection theory 000007926 260__ $$bOregon Health and Science University 000007926 269__ $$a2004-02-01 000007926 336__ $$aThesis 000007926 502__ $$bM.S. 000007926 650__ $$aMicro-Electrical-Mechanical Systems$$038395 000007926 6531_ $$apolydimethylsiloxane 000007926 691__ $$aOGI School of Science and Engineering$$041365 000007926 692__ $$aDepartment of Electrical and Computer Engineering$$041409 000007926 7001_ $$aRoman, Patrick A. 000007926 7001_ $$uOregon Health and Science University$$041354 000007926 8564_ $$963190e7d-e2fd-4623-8bb1-f8e5e5f3716a$$s19166743$$uhttps://digitalcollections.ohsu.edu/record/7926/files/200402.roman.patrick.pdf 000007926 905__ $$a/rest/prod/vt/15/0k/01/vt150k013 000007926 909CO $$ooai:digitalcollections.ohsu.edu:7926$$pstudent-work 000007926 980__ $$aTheses and Dissertations