@article{ETD,
      school = {M.S.},
      author = {Miller, Diane L. and },
      url = {http://digitalcollections.ohsu.edu/record/7959},
      title = {Low temperature ultraviolet lamp-assisted photoetching of  GaAs.},
      publisher = {Oregon Health and Science University},
      number = {ETD},
      doi = {https://doi.org/10.6083/M4J67F37},
      recid = {7959},
      address = {1989-07-01},
}