Passivation behavior of copper thin films for electrochemical planarization application
1999
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Details
Title
Passivation behavior of copper thin films for electrochemical planarization application
Creator
Dianatkhah, Kambiz
Oregon Graduate Institute of Science and Technology
Oregon Graduate Institute of Science and Technology
Publisher
Oregon Graduate Institute of Science and Technology
Date
1999
Subjects
Keywords
Content Type
Dissertation
Degree Type
M.S.
Department
Department of Materials Science and Engineering
Copyright Status
Usage Statement
Record ID
1838
Record Created
2023-06-29