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Influence of surface preparation on the chemical vapor deposition of W on Si(100) and polycrystalline TiN surfaces
Lantz, Scott L.
;
1995
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Title
Influence of surface preparation on the chemical vapor deposition of W on Si(100) and polycrystalline TiN surfaces
Creator
Lantz, Scott L.
Oregon Graduate Institute of Science and Technology
Publisher
Oregon Health and Sciences University
Oregon Graduate Institute of Science and Technology
Date
1995-01-01
DOI
https://doi.org/10.6083/M43R0R47
Content Type
Dissertation
Degree Type
Ph.D.
Copyright Status
In copyright - single owner
Record ID
2053
Record Created
2023-06-29
Record Appears in
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Doctor of Philosophy (Ph.D.)
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