Files
Details
Title
Electrochemical planarization of copper for microelectronic applications
Creator
Huo, Jinshan
Oregon Health and Science University
Oregon Health and Science University
Publisher
Oregon Health and Science University
Date
2004
Subjects
Keywords
Content Type
Thesis
Degree Type
Ph.D.
Department
Department of Electrical and Computer Engineering
School
OGI School of Science and Engineering
Copyright Status
Usage Statement
Record ID
209
Record Created
2023-06-29
Record Appears in
Organizations > Departments and Divisions > Legacy Departments (UOMS/OGC/OGI) > Department of Electrical and Computer Engineering
OHSU Works > Student Work > Degrees > Doctor of Philosophy (Ph.D.)
Organizations > Schools > OGI School of Science and Engineering (2001-2008)
OHSU Works > Student Work > Theses
Theses and Dissertations
All Records
OHSU Works > Student Work > Degrees > Doctor of Philosophy (Ph.D.)
Organizations > Schools > OGI School of Science and Engineering (2001-2008)
OHSU Works > Student Work > Theses
Theses and Dissertations
All Records