Files
Details
Title
Low temperature ultraviolet lamp-assisted photoetching of GaAs.
Creator
Miller, Diane L.
Oregon Graduate Center
Oregon Graduate Center
Publisher
Oregon Health and Science University
Date
1989-07-01
Keywords
Content Type
Thesis
Degree Type
M.S.
Department
Department of Electrical Engineering and Applied Physics
Record ID
7959
Record Created
2023-06-29