The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs Public Deposited

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  • doi:10.6083/M4F769GJ
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  • 1996
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  • McCarthy, J. M. "The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs" (1996). OHSU Digital Collections. https://doi.org/10.6083/M4F769GJ
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