The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs

McCarthy, John M.;

1996

Formats

Title

The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs

Creator

McCarthy, John M.
Oregon Graduate Institute of Science and Technology

Publisher

Oregon Graduate Institute of Science and Technology

Date

1996

Keywords

DOI

Content Type

Thesis

Degree Type

Ph.D.

Department

Department of Materials Science and Engineering

Copyright Status

Usage Statement

Record ID

12

Record Created

2023-06-29

Record Appears in