The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs
1996
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Details
Title
The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs
Creator
McCarthy, John M.
Oregon Graduate Institute of Science and Technology
Oregon Graduate Institute of Science and Technology
Publisher
Oregon Graduate Institute of Science and Technology
Date
1996
Content Type
Thesis
Degree Type
Ph.D.
Department
Department of Materials Science and Engineering
Copyright Status
Usage Statement
Record ID
12
Record Created
2023-06-29